Microstructure study of YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-<i>δ</i></sub> thin film with synchrotron-based three-dimensional reciprocal space mapping

High-temperature superconducting films can be used for fabricating the cutting-edge high-temperature microwave devices because of their low surface resistances. However, resistances materials are particularly sensitive to microstructure due special two-dimensional mechanisms and extremely short coherence lengths. To investigate correlations between resistance materials, YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7-<i>δ</i></sub> (YBCO) with different thickness grown on (00l)-oriented MgO single-crystal substrates by using pulsed laser deposition (PLD) technique. Electrical measurements reveal that transition temperatures room temperature do not show significant difference. in state display a The characterizations microstructures YBCO synchrotron radiation three-dimensional reciprocal space mapping(3D-RSM) technique number grains CuO<sub>2</sub> face parallel (c crystals), consistency grain orientation main causes difference resistance.